thinfilmvacuumchuck

Friday, November 3, 2017

Thin Film Deposition and Fluorine Etch Process Wafer Chucks

Thin Film Deposition and Fluorine Etch Process Wafer Chucks

Applications:

Semiconductor
Photonics
Research & Development
Pilot Run
Mass Production

Vacuum Chuck Table With Integrated Backlight

Tuesday, September 26, 2017

Thursday, June 29, 2017

Thin Film Chuck in Application of Excimer laser Machining

https://www.seas.upenn.edu/~nanosop/ExcimerLaserMachining_SOP.htm

www.chuck-table.com

Thursday, April 7, 2016

semiXicon porous ceramic vacuum chucks are available for a wild array of shapes and sizes for thin film substrates and other flat fragile materials, the chuck’s superb flat surface of porous ceramic distributes the vacuum force equally to mitigate any potential deflection.

The chucks are of different flatness and parallelism depends upon customer’s applications, in most of the cases we are talking about several microns on the entire surface.

The frames to hold the porous ceramic insert can be alumina, stainless steel, or ceramic, we have specially developed the assembly technology which distinguish our chucks to brave harsh working environment with high temperature and humidity.

Some standard designs are

Square: 2”,4”,6”,8”,9”,12”,20”

Round: 2”,4”,5”,6”,8”,9”,12”

Rectangle: 2”*4”,4”*6”,6”*12,12”*20